Achieve Repeatable Accuracy
Advanced microchip production requires a high degree of precision in a vacuum and cleanroom environment. Our PureSteel® stainless steel belts are the only option that deliver repeatable accuracy, are extremely clean and do not outgas over their entire operating life.
Used in wafer transport, our stainless steel drive tapes will position the wafer payload to within 0.001″. This level of accuracy is maintained throughout the tapes’ lifetime, which exceeds 10 million cycles.
Integrated Circuit Production
Advanced microchip production, also known as integrated circuits, requires the level of precise, repeatable accuracy achieved by our stainless steel belts, timing belts and drive tapes. We have helped customers achieve exceptional process control and production of the following:
- Atomic layer etching
- Dielectric etching
- Doping
- Electrochemical deposition
- Ion implantation
- Photolithographic patterning
- Plasma beveling
- Vapor deposition
The Benefits of Stainless Steel Belts for Semiconductor Wafer Fabrication
The smooth, impermeable surface of stainless steel is ideal for delicate processes like vapor deposition, atomic vapor deposition, chemical etching and more, where contamination must be prevented at the microscopic level. In addition to being able to withstand harsh chemicals like piranha solution, RCA clean and acetone, stainless steel is also able to withstand extreme temperatures common to processes like rapid thermal processing, thermal oxidation or furnace anneals.
With so many benefits and options for customization, it’s easy to see why so many involved in the production of semiconductor wafer fabrication turn to Belt Technologies. Let us help you, too. Contact our experts today.
Belt Technologies provides custom industrial automation solutions for applications across industries.
